JPS6136925Y2 - - Google Patents
Info
- Publication number
- JPS6136925Y2 JPS6136925Y2 JP13686578U JP13686578U JPS6136925Y2 JP S6136925 Y2 JPS6136925 Y2 JP S6136925Y2 JP 13686578 U JP13686578 U JP 13686578U JP 13686578 U JP13686578 U JP 13686578U JP S6136925 Y2 JPS6136925 Y2 JP S6136925Y2
- Authority
- JP
- Japan
- Prior art keywords
- sensor chip
- detection
- temperature
- thermal
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 16
- 229910052573 porcelain Inorganic materials 0.000 claims description 12
- 239000000853 adhesive Substances 0.000 claims description 6
- 230000001070 adhesive effect Effects 0.000 claims description 6
- 238000001514 detection method Methods 0.000 description 19
- 238000010438 heat treatment Methods 0.000 description 10
- 239000000919 ceramic Substances 0.000 description 8
- 230000017525 heat dissipation Effects 0.000 description 6
- 238000009413 insulation Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 239000005388 borosilicate glass Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 2
- 239000011093 chipboard Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000000191 radiation effect Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Parts Printed On Printed Circuit Boards (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13686578U JPS6136925Y2 (en]) | 1978-10-06 | 1978-10-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13686578U JPS6136925Y2 (en]) | 1978-10-06 | 1978-10-06 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5553449U JPS5553449U (en]) | 1980-04-10 |
JPS6136925Y2 true JPS6136925Y2 (en]) | 1986-10-25 |
Family
ID=29108503
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13686578U Expired JPS6136925Y2 (en]) | 1978-10-06 | 1978-10-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6136925Y2 (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4683537B2 (ja) * | 2005-03-22 | 2011-05-18 | 理研計器株式会社 | 可燃性ガスセンサー |
-
1978
- 1978-10-06 JP JP13686578U patent/JPS6136925Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5553449U (en]) | 1980-04-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1231745C (zh) | 流量传感器 | |
KR20010037655A (ko) | 마이크로머시닝 기술에 의해 제조되는 저전력형 세라믹 가스센서 및 그 제조방법 | |
JP2004200619A (ja) | ウエハ支持部材 | |
KR101252909B1 (ko) | 가열 가능한 적외선 센서와 이 적외선 센서를 구비하는 적외선 온도계 | |
JPS6136925Y2 (en]) | ||
CN105403321A (zh) | 一种固体表面接触式高灵敏性温度传感器及其制作方法 | |
JP3553613B2 (ja) | ガスセンサのハイブリッド集積回路 | |
US4596975A (en) | Thermally insulative mounting with solid state device | |
CN216746456U (zh) | 一种适用于铝电解槽槽柱温度测量的传感器 | |
JP3386250B2 (ja) | 熱依存性検出装置 | |
JP2523772B2 (ja) | クリップ型容量ひずみゲ―ジ | |
JPH0384425A (ja) | 感熱式流量センサ | |
JP4264156B2 (ja) | ピラニ真空計 | |
JP7081354B2 (ja) | センサ保持基板及びセンサモジュール | |
CN223157288U (zh) | 一种电路板、测温系统及雾化装置 | |
JPH06242048A (ja) | 熱伝導式絶対湿度センサ | |
JPH064305Y2 (ja) | 小型水圧センサ | |
JP4243216B2 (ja) | ウェハ支持部材 | |
JPS63298120A (ja) | フロ−センサ | |
JPH0710286Y2 (ja) | ガス検出装置 | |
KR100331809B1 (ko) | 박막형 절대습도 센서 | |
JPH11295254A (ja) | ガスセンサ | |
JPH0439576Y2 (en]) | ||
JPH0521019Y2 (en]) | ||
JPH0642209Y2 (ja) | フローセンサ |